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Diaphragm Valve

Features

◎ Excellent purge characteristic is realized by minimizing the internal volume to 1.2cm3 (1/4” Male CVC, Open) through reduction of vertical flow paths.

◎ Original wetted area seal mechanism enables highest sealing performance, durability, purge performance, and corrosion resistance.

◎ High corrosion resistance performance by carefully selected diaphragm materials and ultimately smallest individual differences based on KITZ SCT's originalmolding method realized high durability performance.

◎ Handles high-purity gases used with semiconductors and pursues particle performance to the ultimate degree by means of the highest-level productionenvironment and polished inner surfaces.

Specifications

■Product grade

Wetted area material

Precautions

① The valves are designed to be used under atmospheric pressure. Usage such as under vacuum vessels are not guranteed.

② For high temperature applications, please select appropriate material for air-fittings and tubes to assure proper performance.

Straight Type

Branch

Two-step Valve

■Comparison with conventional methods

■Features

◎ An epoch-making combination valve that enables manual flow control and fully on/fully off two-stage control by means of an air actuator.

◎ The control of the fluid by means of a diaphragm rather than a needle realizes a particle free valve and speedy gas supply.

◎ Significant cost savings and space savings are possible by eliminating bypass pipings and control instrumentation required for conventional systems.

◎ The optimal Cv value for the usage objectives can be set arbitrarily.

■Precautions

① In cases where the pressure inside the valve is lower than atmospheric pressure, micro-adjustments of the Cv value may be difficult. Set the Cv value under the same conditions as those of actual usage.

② Flow rates outside the adjustment range will not be reproducible.

③ The valves are designed to be used under atmospheric pressure. Usage such as under vacuum vessels are not guranteed.

④ For high temperature applications, please select appropriate material for air-fittings and tubes to assure proper performance.

■Specifications

■Product Grade

■Wetted Area Material

Two-step valve Cv graph (reference values)

Precautions:

         Two-step valves have a structure that controls the  flow by adjusting the lift amount of the on/off valve  of the diaphragm so that the usage conditions may  cause the pre-set flow to change.

High-temperature Valve (250°)

■Features

◎ All metal components of the valve enable use at 250°C.

◎ KITZ SCT's design minimizes sharp drops in the Cv value in a high temperature environment and realizes high performance, a compact size, and a low price.

◎ Because all of the component parts of the valve, including the actuator, and not just the parts that come into contact with the gas, can be used in a high-temperature  environment, the valves can      be used optimally in metal-organic processes where thermal uniformity is essential.

Specifications

■Product Grade

■Wetted Area Material

■Precautions

① The valves are designed to be used under atmospheric pressure. Usage such as under vacuum vessels are not guranteed.

② For high temperature applications, please select appropriate material for air-fittings and tubes to assure proper performance

  Compact Diaphragm Valves

■Features

◎ With the KCD series, KITZ SCT succeeded in reducing the internal volume to 0.97 cm3, versus the 1.2 cm3 (1/4" CVC male, open position).

◎ While keeping the same design as KD series, it achieved 20% reduction in external size, and the weight is also reduced. (Avaliable only in 1/4")

◎ The durability performance was not compromised, and achieved 2 million cycles (actual value) for the Pneumaticvalve and 100,000 cycles (actual value) for themanual valve.

◎ The highest level production environment and polish quality makes them suitable for use with high purity gases and achieves ultimate particle performance.

■Specifications

■Product Grade

■Wetted Area Material

■Precautions

① The valves are designed to be used under atmospheric pressure. Usage such as under vacuum vessels are not guranteed.

② For high temperature applications, please select appropriate material for air-fittings and tubes to assure proper performance.

Compact Diaphragm Valves

■Features

◎ While maintaining the same degree of basic performance, material, and cleaning, theVLD series realizes security and low cost through overall reduction of the number of  parts and changes to the  review and processing methodology.

◎ Because the cleaning and inspection processes are the same as our conventional model, there is no change in reliability and durability.

◎ Achieves maximum particle performance for high-purity gases used in semiconductor by  the highest-level manufacturing environment and polishing process

■Specifications

■Product Grade

■Wetted Area Material

■Precautions

① The valves are designed to be used under atmospheric pressure.  Usage such as under vacuum vessels are not guranteed.

② For high temperature applications, please select appropriate mate  rial for air-fittings and tubes to assure proper performance.

  Diaphragm Valves for Liquid Gas Delivery

■Features

◎ Capable of using high purity liquid materials such as TEOS used for semiconductor and liquid-crystal production.

◎ Seat assembly can be replaced on the user side while maintaining the valve's basic properties, particle performance, and purge characteristics.

◎ Effective in improving ease of maintenance and reducing running costs for chemical canisters that require periodic cleaning.

◎ Seat assembly replacement tool is the same for both manual and pneumatic operation.

◎ With an actuator diameter of φ39.7mm, it is possible to suport a 40mm line pitch.

■Specifications

■Product Grade

■Wetted Area Material

■Maintenance Parts

 High Pressure Diaphragm Valves

■Features

Manual Valve

◎ Large diameter wheel handle provides smooth operation feel.

◎ The valves employ a large window and easy-to-see OPEN/CLOSE display so that the state of the valve can be confirmed at a glance.

Pneumatic Valve

◎ The new type vertical cylindrical actuator accommodates a minimal line pitch, so there is no need to worry about the orientation after installation.

◎ A compact, high-durability actuator is realized as a result of adopting KITZ SCT's patented wedge-type force booster.

◎ The rigidity of the joint between the actuator and the body is further increased for improved reliability.

◎ Stable opening and closing operation is ensured even at the lower limits of operating pressure, 0.4-0.7 MPa (G).

■Specifications

■Product Grade

■Wetted Area Material

■Precautions

① The valves are designed to be used under atmospheric pressure. Usage such as under vacuum vessels are not guranteed.

② For high temperature applications, please select appropriate material for air-fittings and tubes to assure proper performance.

  Diaphragm Valves 

 ■Features  

◎ Takes the same perfomance as the existing RD series and achieves lower cost through  the reduction of the number of parts.  

◎ Operation torque reduced compared to RD seris.  

◎ Compact size compared to conventional products by reducing height by 6mm.  

◎ More simple, compact, and with lower cost compared to previous designs.  

■Specifications

■Product Grade

■Wetted Area Material

■Precautions

① The valves are designed to be used under atmospheric pressure. Usage such as under vacuum vessels are not guranteed.

Block-type

■Flow Direction

■Features

◎ Excellent degassing characteristics is achieved through minimized flow paths by combining 2 of the KD, KCD, or RD valves together in one valve body.

◎ The basic performance is inherited from the performance of the base valves, and an extremely compact panel design can be achieved by combining the actuators of choice in one valve body.

◎ The optimal flow layout can be made through selection of various flow systems, pipe routing, and fittings.

◎ A series of three or more actuator block valves can also be produced for special applications

■Specifications

■Precautions

① The valves are designed to be used under atmospheric pressure. Usage such as under vacuum vessels are not guranteed.

② For high temperature applications, please select appropriate material for air-fittings and tubes to assure proper performance.

FlickFlicker-type

■Flow Direction

■Features

◎ Flicker valves minimize the dead space by making the valve body of KITZ SCT's dual actuator three-way block valves even more compact. The two valve actuators  are laid out in horizontally          opposed position with the valve body between them.

◎ The compact design of the valve makes design of the layout inside a valve box easier, and helps reduce the volume of the valve box itself.

◎ The simple valve body makes compact design because of easy designing when insulator or heater jacket is required.

◎ Flicker valves can be provided with standard KD, compact KCD, or high pressure RD series actuators.

■Specifications

■Precautions

① The valves are designed to be used under atmospheric pressure. Usage such as under vacuum vessels are not guranteed.

② For high temperature applications, please select appropriate material for air-fittings and tubes to assure proper performance.

 Check Valves

■Features

◎ Made out of SUS316L, these valves have improved corrosion resistance.

◎ These valves have a mechanism such that when there is strong back pressure, the poppet and body contact at each metal part, and the force of the pressing of the  poppet and molded gasket and     the stress are always constant, so a long life will be obtained.

◎ The specially designed molded gasket employs elastomer, instead of a conventional O-ring to minimize the dead space. In addition, special processing prevents  blowouts.

◎ The component parts have simpler structures. In addition, excellent external air-tightness is obtained by the use of metal seat.

◎ Precision fit between the two bodies and the design of the sealing surface provides excellent seal performance.

◎ KITZ SCT has taken advantage of the elasticity of the elastomer during the assembly to achieve highest sealing performance for both external and internal leak.

■Specifications

■Product Grade

■Precautions

① For these valve seals, the appropriate differential pressure for each value of cracking pressure will be needed.

② In cases where the differential pressure is small due to the operating state, variations in seal performance may occur.

③ During initial operation or when operated after long inactivity, the initial cracking pressure may be slightly higher than the cracking pressure specified.

④ The cracking pressure rated on the valve is a pressure for the valve to be fully open, but the valve starts opening at lower than rated pressure.

⑤ Back Pressure Seal is subject to change depending on seat material.

⑥ The valves are designed to be used under atmospheric pressure. Usage such as under vacuum vessels are not guranteed.

⑦ Back Pressure Seal is 69 (KPa) when the seat material is Kalrez.

 B-SEAL IGS Valves

■Valve Features  

◎ KITZ-SCT’s unique B-SEAL structure: Speedy and sure installation is made possible due to its center-lock mechanism. Reduction of assembly process and time required for the maintenance by       user is expected to contribute to an overall cost reduction.  

◎ Using KITZ-SCT’s unique snap mechanism incorporated in manual valves extensively facilitates the operation even in a limited working space. In addition, the valve  can be operated by one-           touch, which helps avoid insufficient or excessive torque when turning the handle to either end, and thus increases an operational reliability.  Considering safety, a miss-operation protective       mechanism (fixing screw) is newly adopted.  

◎ The valve is equipped with a mechanism to avoid miss-insertion and miss-installation by means of notch located on the base.  

◎ The seal type use 1/8”CVC fitting that has been proven in a conventional gas system.

■Major Specifications

■Product Grade

■Precautions

① The valves are designed to be used under atmospheric pressure. Usage such as under vacuum vessels are not guranteed.

② For high temperature applications, please select appropriate material for air-fittings and tubes to assure proper performance.

C-SEAL IGS Valves

■ Valve Features  

◎ These valves are diaphragm valves of Surface Mount type, and are compatible with 1.125” C-SEAL. Both manual and pneumatic valves in this series incorporate a  compact actuator, which allows the valve to suit to fine line pitches.  

◎ The manual valves are 90° open/close types, and capable to equip a lock key for preventing miss-operations. 

◎ TD Series has achieved 0.3 for Cv value that is still higher than that of our KD Series.  

◎ The surface that comes in contact with gases are made rich in chrome, and achieved Cr/Fe >2.0.(SEP specification) 

◎ Achieving Hv300 on the sealing surface, repeated detachability is further improved.

■Major Specifications

■Product Grade

■Precautions

① The valves are designed to be used under atmospheric pressure. Usage such as under vacuum vessels are not guranteed.

② For high temperature applications, please select appropriate material for air-fittings and tubes to assure proper performance.

Bellows Valves

■Features

◎ The proprietary seat shape serves to reduce particle generation from the disk and improves durability.

◎ Smaller dead space enables shorter purge time.

◎ The IB series can be used not only in gas supply systems but also in exhaust systems. Unique specifications such as high temperature, high corrosion resistance, and variable flow rate can also be       accommodated.

■Specifications

■Product Grade

■Standard Materials

■Precautions

① Depending on the customer’s usage conditions, the IB series may have a lower bellows life cycle due to accumulation of buildup material or corrosion.

② The valves are designed to be used under atmospheric pressure. Usage such as under vacuum vessels are not guranteed.

③ For high temperature applications, please select appropriate material for air-fittings and tubes to assure proper performance.

Straight Type

“Variac” Variable Flow Valve

■Comparison with conventional methods

 C-SEAL IGS Valves

■Features

◎ The flow can be controlled by rotating the black handle on top of the actuator. One valve can act as two valves -- a pneumatic valve and a needle valve. This enables  a simpler piping layout, space  conservation, and cost reduction.

◎ High temperature Variac valves (maximum operating temperature 180°C) are also available upon request. A dedicated hot shell heater is also available as a separate

part.

■Specifications

■Product Grade

■Precautions

① The set amount of flow may vary depending on the usage conditions.

② The valves are designed to be used under atmospheric pressure. Usage such as under vacuum vessels are not guranteed.

③ For high temperature applications, please select appropriate material  for air-fittings and tubes to assure proper performance.

Flow-control Needle Valve

■Features

◎ Because of the ultra-precision processing of the needle part and a structure with no backrush, *1 desired flow rate can be set precisely.

◎ A metal gasket is standard and provides excellent heat resistance.

    *1 Backrush: Flowback or the space formed at the rear of the engagement of gears or screws.B

■Specifications

■Product Grade

■Precautions

① Because the needle valves employ a precision handle, please do not apply excessive torque beyond the zero point.

② The valves are designed to be used under atmospheric pressure. Usage such as under vacuum vessels are not guranteed.

lock-type

Bellows Valves  Straight-type

      The  series of pipe size bellows valves have a compact design and are intended for use in high Cv and high durability supply lines.

■Features

◎ We offer not only all purpose butt weld connection but also flange connections and union connecitons.

◎ Achieving reduced weight with forged valve body.

◎ Adopted a seat structure to reduce gas pooling and particle shedding.

◎ By setting the air supply inlet on the top of the actuator, there is no concern over piping direction.

◎ Purge port options available for the Inlet, Outlet, or Both.

■Specifications

■Product Grade

Bellows Valves  Large-size Straight Type

Bellows Valves  Large-size Straight Type

■Features

◎ KITZ SCT’s Y shape structure yields higher Cv than conventional S shape structure.

◎ The inner surfaces of the IBC/IBD valves are uniformly polished whole-surface cylindrical grinding.

◎ Because of their screw-sleeve structure with built-in bearing, the IBE valves require less torque on the handle for easy operation.

◎ Adopted a seat structure to reduce gas pooling and particle shedding.

◎ By setting the air supply inlet on the top of the actuator, there is no concern over piping direction.

◎ Realization of more compact design through positioning the actuator on the side.

◎ Purge port options available for the Inlet, Outlet, or Both.

■Specifications

■Product Grade

Clean Butterfly Valves

■Features

◎ The valve body and the parts in the wetted area are a wafer-shaped industrial butterfly valve made of stainless steel. The parts in the wetted area are polished and undergo oil-free processing in  order to minimize particle accumulation and adhesion.

◎ Because the valves adopt a double eccentric structure in which the stem's center of rotation deviates slightly from the disk seal surface as well as the center of  the disk (pipe), there is no contact between the disk and seat ring when the valve is fully open, which prevents deformation of the seat and excessive abrasion to  ensure a high level of sealing capability.

◎ Giving more width to the disk and seat ring seal surfaces improves the sealing capability, and the valves can be operated with a small opening/closing torque be cause excess swaging is not       necessary.

◎ The seat material is durable PTFE. In addition, cracking, peeling, or excessive abrasion will not occur in the seat ring because it has a double eccentric structure  with fully uniform seal contact pressure, appropriate swaging force, etc., forming a structure that will withstand long-term use.

◎ Use of the gears in the actuation mechanism requires only small amount of force. It also takes up less footprint than conventional lever operated valves.

◎ A pneumatic actuator can be mounted by using a bracket and connector.

■Specifications

■Product Grade

■Standard Materials